ʻO ke kumu waiwai o ka haʻahaʻa pili i loko o kahi lumi maʻemaʻe semiconductor (FAB).

ʻO ka waiwai i manaʻo ʻia o ka haʻahaʻa pili i loko o kahi lumi maʻemaʻe semiconductor (FAB) ma kahi o 30 a 50%, e ʻae ana i kahi palena haiki o ka hewa o ± 1%, e like me ka lithography zone - a i ʻole ka liʻiliʻi i ka hana ultraviolet mamao (DUV) wahi - ʻoiai ma nā wahi ʻē aʻe hiki ke hoʻomaha i ± 5%.
No ka mea, loaʻa i ka haʻahaʻa haʻahaʻa ka nui o nā mea hiki ke hōʻemi i ka hana holoʻokoʻa o nā lumi maʻemaʻe, me:
1. Ka ulu ʻana o ka bacteria;
2. Hōʻoluʻolu lumi lumi lumi no nā limahana;
3. Hōʻike ʻia ka uku electrostatic;
4. ʻO kaʻino metala;
5. Hoʻohuehu wai;
6. Hoʻohaʻahaʻa i ka lithography;
7. Ka hoʻoheheʻe wai.

Hiki ke ulu aʻe ka maʻi bacteria a me nā mea ʻino ʻē aʻe (molds, viruses, fungi, mites) i nā wahi me ka haʻahaʻa haʻahaʻa ma mua o 60%.Hiki i kekahi mau kaiaulu bacteria ke ulu ma kahi haʻahaʻa haʻahaʻa ma mua o 30%.Manaʻo ka hui e hoʻomalu ʻia ka haʻahaʻa ma waena o 40% a 60%, hiki ke hōʻemi i ka hopena o ka bacteria a me nā maʻi hanu.

ʻO ka haʻahaʻa haʻahaʻa ma waena o 40% a hiki i 60% he ʻano haʻahaʻa no ka hōʻoluʻolu kanaka.ʻO ka nui o ka haʻahaʻa hiki ke hoʻonanea i ka poʻe, ʻoiai ʻo ka haʻahaʻa ma lalo o 30% hiki ke hoʻomaloʻo i ka poʻe, ʻeha ka ʻili, ʻeha hanu a me ke kaumaha ʻole.

ʻO ka haʻahaʻa kiʻekiʻe e hōʻemi maoli i ka hōʻiliʻili ʻana o nā koina electrostatic ma luna o ka lumi maʻemaʻe - kahi hopena i makemake ʻia.He kūpono ka haʻahaʻa haʻahaʻa no ka hōʻiliʻili kālā a me kahi kumu hoʻopōʻino o ka hoʻokuʻu electrostatic.Ke ʻoi aku ka haʻahaʻa haʻahaʻa ma mua o 50%, hoʻomaka ka hoʻoheheʻe ʻana o nā koina electrostatic, akā i ka emi ʻana o ka haʻahaʻa haʻahaʻa ma mua o 30%, hiki iā lākou ke hoʻomau no ka manawa lōʻihi ma luna o kahi insulator a i ʻole kahi papa honua.

Hiki ke hoʻohana ʻia ka haʻahaʻa haʻahaʻa ma waena o 35% a me 40% ma ke ʻano he kuʻikahi maikaʻi, a ʻo nā lumi semiconductor maʻemaʻe e hoʻohana maʻamau i nā mana hou e kaupalena i ka hōʻiliʻili ʻana o nā uku electrostatic.

ʻO ka wikiwiki o nā hopena kemika he nui, me nā kaʻina hana corrosion, e piʻi me ka piʻi ʻana o ka haʻahaʻa pili.He wikiwiki nā ʻili a pau i ʻike ʻia i ka ea a puni ka lumi maʻemaʻe.